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  • Our new SEM simulator can simulate the SEM image formation by CD SEM tools.
  • Yellow fields can have formulas that refer to variables. Variables can take on multiple values. When variables with multiple values ...
  • The GDS-Multi-site mask pattern lets users choose multiple sites to simulate.
  • The line/space pattern is parameterized with two variables, 'pitch' and 'cd'. Simulated CD is plotted in different ways with respect ...
  • The Panoramic API (aka SOAPI/apiserver) is used to load an .hlin file, run the simulation and fetch the aerial image and resist ...

In-Depth Information on Hyperlith Tutorial 1 Getting Started

A general, quick introduction to the The GDS-Multi-site mask pattern lets users choose multiple sites to simulate. In this series of videos we're going to tune a resist parameter set we're going to HyperLith

The "image averaging" option in

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